High Precision Laser Drawing System Using Cooperation Control of Low-Precision Pulse-Stages and Piezo-Stage

Abstract

Precise patterning of optical waveguides is required in fabrication of integrated-optic circuits. In this paper, stage control for laser drawing system with 10nm precision is investigated. The precise control is performed by analog and digital feedback with pulse stages and piezo stages. Mechanical fluctuation and vibration due to pulse drive by stepping motors are compensated by piezo stage. Further, cooperation of pulse and piezo stages is demonstrated to make smooth translation of stage possible.