On Performance of the Gradient Temperature Control Method for Uniform Heating

Abstract

Dynamic uniform temperature on thermal conduction surface is widely required in many applications. In our previous work, the Gradient Temperature Control (GTC) method for the uniform heating has been proposed, and the effectiveness of the control system was clarified. The main idea of GTC is to control the average and gradient temperatures on the surface in order to suppress the thermal interference of the heater. The temperature on the heating plate is made uniform not only in steady state but also in transient state. As a result, uniform thermal process and short process time until uniform heating are realized. In order to confirm the effectiveness of the GTC, experimental results for a realistic application are shown and evaluated.