Optimization of Transparent Conducting ZnO Films Deposited on PVC Substrate by PLD Method

Abstract

Approximately 300 nm-thick Al-doped transparent conducting zinc oxide films (AZO(Al₂O₃:1.5 wt.%)) have been deposited on glass and PVC substrates by a pulsed laser deposition (PLD) using ArF excimer laser (λ=193 nm) with energy of 40-100 mJ at the repetition frequency of 50 Hz. When fabricated with the laser energy of 40-100 mJ, similar characteristics of electrical properties and optical transmittance were obtained for the AZO films deposited on glass or PVC substrates. Namely, the lowest resistivity obtained was 6.34×10^-4Ω·cm and an average optical transmittance was more than 80 % in the visible range. But, when prepared with the laser energy of 80-100 mJ, surface roughness for the AZO films fabricated on PVC substrates decreased compared to the films deposited on glass substrates. Moreover, for the AZO films fabricated on PVC substrates, an average optical transmittance in the visible range was reduced to 30-50 %.