Abstract
This paper proposes an optical proximity correction (OPC) using an Adjustable OPCed cell and genetic algorithms (GA) to achieve optimal OPC feature generation for the full-chip area at fast processing speeds. GA is an efficient optimization technique based on population genetics. In this approach, an Adjustable OPCed cell consists of two parts. The first part is the “fixed area”, which includes OPC feature data from a conventional OPC technique. The second part is the “adjustable area”, which is located in the peripheral regions of the cell and includes adjustable OPC variables. As the values of these variables are greatly influenced by neighboring cell patterns, the variables are quickly optimized by the GA after cell layout. The effectiveness of this approach, in terms of reduced times for accurate simulations and repeated modification of OPCed features, is demonstrated through computational experiments.
