Abstract
In this paper, three parameters such as position and size of an object inserted between the sensor and temperature in the equipment are estimated by using the electrical and ultrasonic integrated sensor. The integrated sensor consists of a pair of piezoelectric ceramics. Propagation time is measured by a pair of piezoelectric ceramics, and conductance between a pair of piezoelectric ceramics is also measured by the electrode on the surface of piezoelectric ceramic. Therefore, electrical and ultrasonic properties are obtained by the proposed sensor. In the experiment, gypsum as the object was inserted between a pair of piezoelectric ceramics which were arranged inside the cylindrical equipment filled with saline water of 0.1% concentration, and conductance and propagation time were measured by a pair of piezoelectric ceramics at temperature of 20°C, 25°C, and 30°C. Three kinds of gypsum which have the diameters of 35mm, 50mm and 65mm as the object were prepared. The position and diameter of gypsum and temperature in the equipment were estimated from propagation time and conductance measured by the integrated sensor.
