Position Measurement System for a Mobile Microrobot Used in a Desktop Manufacturing System

Abstract

This paper describes a position measurement system for a mobile microrobot used in a desktop manufacturing system. Three line laser projectors are carried by linear stages, which are placed above the microrobot. The mobile microrobot carries three optical devices which receive laser beams. The position and orientation of the microrobot is determined by the position of the linear stages. The measurement accuracy in 8 mm × 8 mm area was about 5 μm, and that in 50 mm × 50 mm area was about 50 μm.