Abstract
Soft x-ray and gamma-ray beam sources are developed by using laser and high energy electron beams. Laser plasma soft x-ray source is a cryogenic Xe target irradiated by a high average power (>100 W) and high peak power (30MW, 0.3 J/10 ns) laser. A conversion efficiency from the laser energy to the soft x-ray (70-200eV) energy of 22% was achieved. Laser Compton gamma-ray source on a synchrotron radiation facility, NewSUBARU, is new quasi-monochromatic high energy photon beam. World highest class gamma-ray flux of more than 106 photons/s is generated at photon energy range of 6 to 17 MeV.