Bio Nano-Tool Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Application

Abstract

FIB-CVD is a key technology for fabricating three-dimensional structures. Two kinds of bio nano-tools were developed for subcellular manipulations and analysis. The first was a bio nano-injector, which is a very useful tool because the shape and size of its tip can be freely designed for various functions in local areas. We also fabricated a filtering tool with a nano-net structure on a glass capillary to capture subcellular organells.