Abstract
Realization of high sensitive biosensors is required. As an acoustic wave based biosensor can detect immunoreactions, it is expected for applying the biosensor. In this paper, a shear horizontal (SH) acoustic wave in layered structures, namely Love wave, is discussed on the basis of numerical calculations. For generating the Love wave, a 36YX-LiTaO3 is chosen as a piezoelectric substrate. Also, SiO2, polymer, and gold are chosen as guiding layer materials. First, phase velocity and propagation loss are calculated as a function of layer thickness. Then, an additional mass layer is loaded on the guiding layer for simulating bio-layer deposition. The simulated results indicate that high sensitive biosensor is realized by using gold guiding layer.
