Development of a UV Light Source using Pr:LuAG Thin Film Target Pumped by Electron Beam

Abstract

Pr:LuAG thin film was deposited by PLD. Before and after thermal treatment, each film was characterized using XRD, SEM and Cathode Luminescence. Thermal treatment led this film to crystallization of Pr:LuAG with garnet structure. And UV emission was obtained from the Pr:LuAG film pumped by irradiating electron beam. We applied this technique to produce a product of a UV light source using Pr:LuAG thin film target pumped by electron beam.