Formation of Textured Al Thin Film on Periodic Micro-Swelling Structure Fabricated on Silicone Rubber Surface to Realize Superhydrophobicity

Abstract

Periodic micro-swelling structure was fabricated on silicone rubber by the 193-nm ArF excimer laser induced photodissociation of silicone; subsequent deposition of Al thin film on the sample surface significantly improved the superhydrophobicity. To discuss the improvement, Al thin film was deposited on a flat slide glass, silicone rubber and silicone resin substrates. Under a scanning electron microscope, textured structure of Al thin film was found only on the silicone rubber. As a result, contact angle of water on the sample with the textured Al indicated to be approximately 165 degrees, compared with the case of 155 degrees before Al deposition.