Analysis of Paraffin Thin Film by Spectroscopic Ellipsometer

Abstract

Optical constants and thin film structures of paraffin thin films were analyzed by a spectroscopic ellipsometer. As a result, it was found that the film thickness and the structure changed depending on the film forming temperature. In this experiment, the film thickness was thicker at low temperature and thinner at higher temperature. It is considered that this is because the melting point of paraffin was about 65 degrees, and therefore, when the paraffin was applied to the substrate at a low temperature by the roller, there was a part that was not completely melted, and it was thought that the paraffin was deposited thickly.