2024 Volume 144 Issue 3 Pages 204-211
The mechanical short-circuit failure mode of 1.2 kV class SiC MOSFETs was investigated by experiment and electro-thermal-mechanical technology computer-aided design (TCAD) simulation. In this work, the details of the simulation procedure are described. TCAD simulations provide a powerful means to address the mechanical failure of such devices, and indicates that high-level stress concentrates at the gate dielectric layer because of the large thermal expansion coefficient of the source metal. Further, a low mechanical stress design for short-circuit in SiC MOSFETs is proposed by using low thermal expansion metal such as copper as the source electrodes.
The transactions of the Institute of Electrical Engineers of Japan.C
The Journal of the Institute of Electrical Engineers of Japan