Hitachi Research Lab. Hitachi, Ltd.
Central Research Lab. Sumitomo Metal Ind. Ltd.
Kashima Works, Sumitomo Metal Ind. Ltd.
1972 Volume 92 Issue 2 Pages 100-109
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The Journal of the Institute of Electrical Engineers of Japan
IEEJ Transactions on Sensors and Micromachines
IEEJ Transactions on Industry Applications
IEEJ Transactions on Electronics, Information and Systems
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