IEEJ Transactions on Electronics, Information and Systems
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
Advanced Characterization-Techniques for Silicon Related Thin Films
Thier applications to SiO2/Si interface structure
Takeo Hattori
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1992 Volume 112 Issue 11 Pages 641-647

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