IEEJ Transactions on Electronics, Information and Systems
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
Characteristics of Capacitor with Organic Conductors Solid Electrolyte by Ion-Assisted Evaporation
Jun KyokaneKatsumi Yoshino
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1994 Volume 114 Issue 11 Pages 1095-1100

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Abstract
Recently organic thin films have been widely used as electrical and electronic elements, sensors, coatings, protectors, lithographic layers, etc. Among various methods for preparation of thin films, an evaporation technique under vacuum is one of the most simple and convenient methods. In this study we applied a new technique, ion-beam-assisted deposition, utilizing ion beam irradiation during the preparation of the organic thin films by evaporation.
As an example, conducting organic thin films of charge transfer complex have been prepared on porous oxide Al plates by means of evaporation under ion beam irradiation. A solid electrytic capacitor with a large capacitance per unit area and a good frequency response of impedance can be fabricated using organic thin films obtained with this method.
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© The Institute of Electrical Engineers of Japan
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