(Ba<sub>x</sub>, Sr<sub>1-x</sub>) TiO<sub>3</sub> Films for Gbit Scale DRAMs

IEEJ Transactions on Electronics, Information and Systems

Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221

(Ba_x, Sr_1-x) TiO₃ Films for Gbit Scale DRAMs

Akimasa Yuuki

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Keywords: DRAM, BST, CVD

JOURNAL FREE ACCESS

1997 Volume 117 Issue 3 Pages 217-219

DOI https://doi.org/10.1541/ieejeiss1987.117.3_217

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