SOI Technology Originated in Japan: For the Special Issue of the “Supermicrostructure Integrated Devices and Process Technologies”

IEEJ Transactions on Electronics, Information and Systems

Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221

SOI Technology Originated in Japan: For the Special Issue of the “Supermicrostructure Integrated Devices and Process Technologies”

Yasuo Tarui

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2001 Volume 121 Issue 3 Pages 479

DOI https://doi.org/10.1541/ieejeiss1987.121.3_479

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