Influence of tube-diameter on the light emission luminance in radio-frequency electrodeless discharge pkasma.

Abstract

We have examined influence of light emission luminance and electron density with the generation of the radio-frequency discharge plasma by changing the tube diameter of 30mm and 20mm. Phosphor (BaMgA110017:EU) was applied for Xe excitation with Ne-Xe mixture gases. It was found that at the flow rate with 50sccm and 100sccm of Ne and 0.1-4sccm of Xe, light emission luminance for 30mm tube diameter was higher than one for 20mm diameter. It was also obtained that the measured electron density for the 20mm tube diameter was higher than one for 30mm diameter. This apparent contradiction would be caused by the re-combination near the tube wall.