2010 Volume 39 Issue 1 Pages 2-11
In the diffraction grating used as holographic optical element (HOE), it not only needs a high diffraction efficiency but also excellent wavelength and the incident angle characteristics over a wide range are required. We analyze the electromagnetic wave scattering problem from multilayer-coated Fourier grating for a general angle of incidence and arbitrary polarization. This analysis is treated a quasi-two-dimensional problem in the scalar boundary value. This formulation is also useful expression because R-matrix propagation algorithm is avoided a singularity of matrix elements for the evanescent mode. Numerical examples are presented for diffraction efficiencies which incident angle and azimuth angle of Fourier grating are variable.