Feasibility Study on the Stylus Cleaning Method for Microstructure Measurement Using Supersonic Flow

Abstract

In recent years, the number of three-dimensional parts with microstructures has increased. We have developed a measurement system that uses a small-diameter optical fiber stylus. When the stylus with foreign substances adhered to it is used for measurement, the measurement error is caused by the thickness of the foreign substance when it is located between the stylus tip and the measured object. In this study, the feasibility of cleaning foreign substances adhering to the styli for microstructure measurement was investigated using supersonic flow. As a result, particles with a diameter of 2 µm adhering to a stylus with a diameter of 60 µm or more can be removed using a supersonic nozzle.