Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage

Abstract

A stereo camera system with digital image correlation (DIC) was developed for accurate measurement of the position and orientation of a precision positioning stage. Stereo correspondence was carefully calculated by sub-image matching based on the DIC method. Camera parameters for the triangulation were determined from the measurement results of x, y, and z translation of an accurate positioning stage. The measured root mean square random errors were 0.6 μm in the in-plane direction and 1.7 μm in the out-of-plane direction. The proportional errors in the in-plane and out-of-plane directions were 0.2 μm/10 mm and 0.5 μm/10 mm, respectively.