2023 Volume 36 Issue 11 Pages 392-399
This paper deals with high-speed and high-precision transfer control of silicon wafers by a belt-driven robot. We propose a target trajectory design while we only can change the trajectory due to the industry’s strict development limitations. The proposed trajectory design has a piecewise linear type velocity profile. Gradients of each segment in the piecewise profile, that is acceleration, are designed with a consideration of two factors: The effects of belt elasticity and kinematics between the amount of belt elongation and the amount of tracking error. To reduce the amount of tracking error effectively, we also propose a design indicator which combines the two factors for designing the profile. An experiment with the belt-driven type wafer transfer robot UTM-R3700F, currently in use in industry, illustrates that the proposed trajectory design with the proposed indicator reduces tracking error compared to the conventional trajectory design.
