Transactions of the Institute of Systems, Control and Information Engineers
Online ISSN : 2185-811X
Print ISSN : 1342-5668
ISSN-L : 1342-5668
Physical Parameter Estimation of Semiconductor Exposure Apparatus Supported by Anti-Vibration Units Based on Multivariable System ldentification Results
Hiroyuki TAKANASHI, Takehiko MAYAMA, Shinji WAKUI, Shuichi ADACHI
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Keywords: semiconductor exposure apparatus, physical parameter, subspace method, state space model
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2001 Volume 14 Issue 8 Pages 418-420

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