SYSTEMS, CONTROL AND INFORMATION
Online ISSN : 2424-1806
Print ISSN : 0916-1600
ISSN-L : 0916-1600
Robustness in Nano-Scale Measurement : New Techniques for Scanning Probe Microscopy(<Special Issue>Understanding the Robustness)
Masayuki ABE, Yoshiaki SUGIMOTO, Seizo MORITA
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Keywords: scanning probe microscopy, non-contact atomic force microscopy, frequency modulation atomic force microscopy, thermal drift, atom tracking
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2011 Volume 55 Issue 4 Pages 141-146

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© 2011 The Institute of Systems, Control and Information Engineers
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