Abstract
Neither high accumulation nor densification on micro mechatronics are so advanced comparing with semiconductor devices. Our research aims at the establishment of design and fabrication to perform miniaturization, high accumulation and high densification by integrating mechano-micro elements. In difficult assembly of these elements, a stereolithography method is used to form the entire micro fluid power systems in all-in-one design including actuators, pumps and valves. In this paper, prototype models based on a bourdon type and diaphragm type of micro fluid power devices are fabricated and experimentally investigated. Some problems regarding design and fabrication of micro fluid power systems are discussed.
