ISIJ International
Online ISSN : 1347-5460
Print ISSN : 0915-1559
ISSN-L : 0915-1559
Special Issue on "Frontier in Characterization of Materials and Processes for Steel Manufacturing"
Portable Total Reflection X-ray Fluorescence Spectrometer with a Detection Limit in the 100 ng/L Range
Yuya AkahaneSunfun NakazawaShinsuke Kunimura
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2022 Volume 62 Issue 5 Pages 871-874


In this study, a method was presented for detecting low concentrations of elements in a high purity water sample using a portable total reflection X-ray fluorescence (TXRF) spectrometer. Preparing the dry residue of a sample droplet with large volume on a hydrophobic film coated sample holder was effective for improving the detection limit expressed as the concentration of a target element in a sample solution. When a TXRF spectrum of the dry residue of a 200 µL droplet of a solution containing 10 µg/L of Cr that was prepared by diluting a commercially available 1000 mg/L Cr standard solution with ultrapure water on a hydrophobic film coated sample holder was measured, a detection limit of 0.13 µg/L was achieved for Cr.

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