5-5 Performance improvement of ultrahigh-speed CCD

Abstract

We successfully developed ultrahigh-speed CCD with maximum frame rate of 2 million frames per second. To estimate maximum frame rate, the equivalent circuit model of the CCD was analyzed. As a result, it was cleared that the driving voltage became blunt with increasing driving speed. The frame rate dependence of the blunt of the driving voltage accorded with the frame rate dependence of the saturation signal level.