14-5 Development of a low-voltage-operating silicon electret condenser microphone

Abstract

Toward a low-voltage-operating high-performance microphone for next generation, we are studying a silicon electret condenser microphone. Recently we developed a prototype microphone with inorganic electret charged by corona discharge. The microphone exhibited sufficient sensitivity and frequency range comparable to biased silicon condenser microphone. We also confirmed outstanding heat resistance of the inorganic electret compared to conventional organic electrets.