The Journal of The Institute of Image Information and Television Engineers
Online ISSN : 1881-6908
Print ISSN : 1342-6907
ISSN-L : 1342-6907
Activity Notes on Standardization(23)
International Standardization of Evaluation Methods of Image Sharpness for Scanning Electron Microscope
Mitsugu Sato
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Keywords: scanning electron microscope, SEM, resolution, image sharpness, FT method, DR method
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2013 Volume 67 Issue 2 Pages 141-143

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© 2013 The Institute of Image Information and Television Engineers
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