The Journal of The Institute of Image Information and Television Engineers
Online ISSN : 1881-6908
Print ISSN : 1342-6907
ISSN-L : 1342-6907
(6)
Ultrafast Dark-Field Surface Inspection by Hybrid Dispersion Laser Scanning
Akio Yazaki, Keisuke Goda, Bahram Jalali
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Keywords: Surface inspection, Ultrafast inspection, High-speed imaging, Hybrid dispersion, Dark-field, Laser scanner
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2015 Volume 69 Issue 7 Pages 574-579

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