512×486 Cells CCD Image Sensor

Abstract

A charge-coupled area image sensor of the frame transfer type has been fabricated using four-phase two-level polysilicon electrode structure.
The device has 512 vertically interlaced rows and 486 resolution cells per line.
Although the fabrication technique has not advanced yet to produce defect-free devices, high quality images with few white defects are produced by introducing new driving modes.
The measured resolution limits show more than 350 TV line pairs horizontally as well as vertically.