Abstract
A Frame Interline Transfer CCD image sensor with 1258 (H) × 1035 (V) pixels is developed for a HDTV camera with 3 chips. To obtain a high speed frame transfer, a novel gate structure is devised where an Al layer is used not only as a photoshield but also as a pulse supply wire. As a result, the attained transfer speed is as high as 625 kHz, together with a smear level as low as 0.001% and a dynamic range of 72 dB. To suppress power consumption, a dual horizontal CCD (HCCD) is used. This CCD is designed by device simulation to avoid potential barrier formation causing vertical fixed pattern noise. The obtained chip has vertical and horizontal resolutions of 700 TV lines and a low image lag below 1%.
