A 410k pixel PtSi Schottky-Barrier Infrared CCD Image Sensor

Abstract

A 811 × 508 pixel PtSi Schottky-barrier infrared CCD image sensor which has the greatest number of pixels for a Standard TV format was developed. We achieved a 38% fill-factor of 18 × 21μm size pixel for this image sensor by using 1.0μm design rules. The noise equivalent temperature difference with f/1.2 was 0.06 K at 300 K. The responsivity nonuniformity with a 300 K background signal was estimated at 0.45%. The sensor obtained execellent thermal imaging without uniformity correction.