A 2/3-inch 2M-pixel Progressive-Scan A-FIT CCD Image sensor

Abstract

A 2/3-inch 2M-pixel CCD image sensor with and advanced frame interline transfer (A-FIT) structure is proposed in this paper. The new sensor is equipped with both interlaced and progressive scanning to meet the increasing demands for progressive scanning in various fields. The vertical CCD register in the storage area consists of two vertically divided registers so that the sensor can output the signal in progressive mode. The advantage of this structure is that both progressive and interlace scanning can be done without increasing the number of stages of the vertical CCD. An inproved vertical MTF and improved limiting vertical resolution of 1035 TV lines were obtained with a test device fabricated with a three layer poly-silicon process.