ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
23.15
Session ID : VIR99-7
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A Comparative Study of Fabrication Processes for Barium Ferrite Thin Films
Liu Xiaoxi, Bai Jianmin, Wei Fulin, Yang Zheng, Akimitsu Morisako, Mitsunori Matsumoto
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Keywords: Barium ferrite thin film, Sputtering, Magnetic recording media
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Abstract
Ba-ferrite thin films were successfully prepared by using a facing target sputtering system. Magnetic, crystallized thin films were obtained both by ex-situ and in-situ processes. In this paper, thin films prepared by these two processes were studied on the aspects of crtstal structure, magnetic properties and surface morphology It is found that the imperfection in the thin films strongly effects the magnetic properties of these films
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© 1999 The Institute of Image Information and Television Engineers
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