Abstract
The nanocrystallite Fe-Ta-N thin film with high Ta content were prepared by reactive sputtering. The dependence of structures and magnetic properties on P(N_2)and annealing were investigated by X-ray diffraction and VSM. It is found that Ta atoms replace Fe atoms of α-Fe lattice in nitrogen-free films, and a substituted solid solution is formed to the contrary. In nitrogened film the as-deposited films mainly consist of amorphous. After proper annealing, nanocrystallite α-Fe grains of(110)oriented crystallized fron the amorphous matrix. and excellent soft magnetic properties are obtained, due to the exchange coupling between nanocrystallite α-Fe grains.
