Abstract
Reports on Thin Film Materials and Deposition, Photolithography and Photoresisit Coating and Environmentally Conscious Manufacturing are summarized for 1999 Display Manufacturing Technology Conference. Reports were mainly on thin-film deposition and pattern etching, potolithography, environmental impact assessment technologies for TFT-LCDs, solar cells, PDP and micro-electronic circuits. There were many topics concerning p-Si TFT, a-Si TFT-LCD gate lines, ITO sputtering and photoresist coating. Environmental impact assessment for displays and safer alternatives to high pressure toxic gases are also included.
