Abstract
An 8 channel parallel readout CCD image sensor for high-speed imaging has been developed. The image area of this sensor is divided into 8 rectangular blocks, and the data of each block is read out through an independent amplifier. In the area where there is no photediode (PD) beside VCCD, the space of VCCDs is narrowed down to a HCCD block that is placed at the end of VCCDs, and amplifiers and their peripheral circuits are placed between the spaces of two HCCD blocks with parallel to makes amplifier properties uniform across channels. For VCCD high-speed transfer, VCCD metal wiring structure is used and VCCD slant structure is optimized by the computer 3D simulation. The pixel size is designed to be 11.5 μm x 11.5μm, and amplifiers are placed close to FDA (Floating Diffusion Amplifier) with VCCD slant structure, which realized wide dynamic range.
