Abstract
Rate-earths(thulium, terbium, europium)doped yttrium oxide thin film phosphors are prepared by electron beam evaporation method on amorphous quarts, ITO and ZnO film on quartz substrates. The crystallinity of the films depended on the kind of substrate and substrate temperatures. It was found that the crystallinity and CL luminance of Y_2O_3:Tm film deposited on ZnO film with strong[0001]orientation showed much better than that of the Y_2O_3:Tm film on ITO glass substrate. Y_2O_3:Tb and Y_2O_3:Eu films were tried as blue, green and red emitting thin film phosphors, respectively. These thin film phosphors showed the color coordinates of Tm(0.13, 0.07), Tb(0.58, 0.35)and Eu(0.32, 0.57). Moreover, those phosphor films showed 2.19(Tm), 187.0(Tb)and 89.4cd/m^2(Eu)at 3kV, 60μA/cm^2. It is expected from these results that the RGB emitting Y_2O_3 thin films activated with rare earths have potentiality for field emission displays with high luminescence and good chromaticity.
