Abstract
We have developed a large scale, 3.4M pixel, high-speed, 680MHz data rate, TDI image sensor suitable for use in confocal microscope applications. Since the confocal optics has a pinhole aperture that restricts the light intensity, TDI scanning has an advantage in collecting more photons. It is not a simple task to satisfy the 100% aperture efficiency requirement and a complete charge transfer both at the same time. We have solved this problem by developing a unique TDI cell and a novel Split Gate Virtual Phase CCD technology that have met the required performance goals. Another important sensor feature, in addition to its high data rate readout, is itsbi-directionalcharge transfer scan in vertical image direction. This significantly simplifies the system mechanical design
