A user data capacity of more than 23 Gbytes will be required for a next generation optical disk to store two hours of high definition digital television (HDTV) broadcast signals. It is difficult to realize high-density optical disk mastering using laser beam recorders (LBR) owing to their resolution limits. Therefore, we developed an electron beam recorder (EBR). We evaluated the performance of the EBR for the high-density optical disks.