Abstract
A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives (HDDs) was proposed and developed. This dual-stage actuator device was characterized by applying the sputter-deposited thin film PZT, instead of the previously proposed bulk type PZT. The device performance was found outstanding with the peak -to-peak head displacement of 1.1 microns at the applied voltage of +/- 5 volts, and the suspension resonance frequency over 15 kHz.
