ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
36.18
Session ID : IST2012-14/CE2012-26
Conference information
A 1.41μm FSI sensor with novel light guiding structure consisting of stacked lightpipes
Hisashi Watanabe, Jun Hirai, Motonari Katsuno, Keishi Tachikawa, Masao Kataoka, Saori Kawagishi, Hiroko Kubo, Hisashi Yano, Shigeru Suzuki, Gen Okazaki, Kouichi Yamamoto, Hiroshi Fujinaka, Takashi Fujioka, Masakatsu Suzuki
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Keywords: Image sensor, FSI, Lightpipe, Separation wall, 1.4μm pixel
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Abstract
A frontside illuminated image (FSI) sensor with novel light guiding structures consisting of stacked lightpipes was developed using 45nm Cu processing on 300 mm wafers. We demonstrated a high quantum efficiency (QE) of 75% and maximum incident angle of 40°, which exceeds the performance of backside illuminated image (BSI) sensors [1,2,3].
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© 2012 The Institute of Image Information and Television Engineers
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