A Time-of-Flight Image Sensor with Sub-mm Resolution Using Draining-Only Modulation Pixels

Abstract

This paper describes new TOF measurement technique for high range resolution of the order of sub-mm or several tens of urn. For the distance caliculation, impulse response of photocurrent by means of very short light pulse is used. A draining-only modulation pixel provides high response and loss-free electron integration. The test chip fabricated in 0.11 um CIS technology demonstrates modulation contrast is measured to be 85%. The average range resolution is measured to be 210 urn at measurable range of 50 mm.