ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
40.12 Information Sensing Technologies(IST)
Session ID : IST2016-10
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Stacked Image Sensor Using Chlorine-doped Crystalline Selenium Photoconversion Layer Composed of Size-controlled Polycrystalline Particles
Shigeyuki IMURAKazunori MIYAKAWAHiroshi OHTAKEMisao KUBOTAKenji KIKUCHIToru OKINOYutaka HIROSEYoshihisa KATONobukazu TERANISHI
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Abstract
We demonstrate a stacked CMOS image sensor overlaid with a chlorine (Cl)-doped crystalline selenium (c-Se) photoconversion layer. The size of the polycrystalline particles (grains) of c-Se, which is strongly related to the quality of the captured image, is decreased by Cl doping into c-Se; hence the surface flatness of c-Se has markedly improved. We successfully prevent the emergence of white spots in the image, which are caused by the localization of the electric field, by applying a Cl-doped c-Se as a photoconversion layer.
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© 2016 The Institute of Image Information and Television Engineers
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