Abstract
We describe a high optical performance 3.4 μm pixel pitch global shutter CMOS image sensor with a light guide structure. The sensitivity and the parasitic light sensitivity are 28,000 e-/lx·s and -89 dB, respectively. Moreover, the incident light angle dependence of sensitivity and parasitic light sensitivity has been improved by the light guide structure. The pixel achieves 1.8 e- temporal noise and full well capacity of 16,200 e- with charge domain memory in 120 fps operation by multiple accumulation shutter technology.