7-5 Development of electret charging technique using soft X-rays for silicon microphone

Abstract

Toward an ultraminiature high-performance microphone for the next generation, we are studying a silicon microphone. With the aim of low-voltage operation for this microphone, we developed a charge storage technique using soft X-rays. Experimental results show that internal inorganic dielectric film storages and keeps electric charges, which indicates that this dielectric film becomes electrets. This technique shows promise as a low-voltage operation silicon microphone.