Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1414
10
Session ID : 2-PH-2
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2-PH-2 Application of High Resolution Acoustic Microscope to LSI
Yasauo Sasaki, Yasuhiro Ohmura, Motoyuki Tagawa, Mitsugu Sakai, Koichi Karaki
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© 1989 Institute for Ultrasonic Elecronics
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