Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1414
13
Session ID : PA25
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PA25 Spatial distribution of EL2 in GaAs wafer by the photoacoustic spectroscopy
A. Fukuyama, T. Ikari, K. Maeda, K. Futagami
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© 1992 Institute for Ultrasonic Elecronics
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